Keyphrases
Fourier Transform Infrared Spectroscopy (FT-IR)
100%
X-ray Photoelectron Spectroscopy
100%
Carbon Nitride Film
100%
Roman
100%
Reactive Magnetron Sputtering
100%
C-ratio
100%
Closed Field
100%
Nanoindentation Measurement
50%
Mechanical Properties
50%
Scanning Electron Microscopy
50%
Mechanical Analysis
50%
Tribological Properties
50%
Atomic Force Microscopy
50%
Tribological Measurements
50%
Si(111)
50%
Pin-on-disc Tribometer
50%
N2 Pressure
50%
Wear Resistance
50%
CNx Film
50%
Ar Flow Rate
50%
Sp3 Bonds
50%
Nanohardness
50%
Concentration Ratio
50%
Wear Rate
50%
Flow Rate Ratio
50%
Steel Substrate
50%
Scattering Transform
50%
Carbon Nitride
50%
Room Temperature
50%
Tribology
50%
Atomic Force Microscopy Nanoindentation
50%
Scratch Tester
50%
Closed Field Unbalanced Magnetron Sputtering (CFUBMS)
50%
Friction Coefficient
50%
M42 High Speed Steel
50%
C Concentration
50%
In Films
50%
Substrate Biasing
50%
N Content
50%
Material Science
Film
100%
Magnetron Sputtering
100%
Carbon Nitride
100%
X-Ray Photoelectron Spectroscopy
22%
Thin Films
11%
Nanoindentation
11%
Fourier Transform Infrared Spectroscopy
11%
Scanning Electron Microscopy
11%
Mechanical Testing
11%
Wear Resistance
11%
Coefficient of Friction
11%
High Speed Steel
11%
Nanohardness
11%