Diamond-like carbon coating applications in MEMS

Muhammad Usman; Hafiz Mahmood Ilahi; Muhammad Umar Farooq; Mudassar Rauf; Muhammad Asim; Sarmad Ali Khan

doi:10.1002/9781394189144.ch12

Diamond-like carbon coating applications in MEMS

Muhammad Usman
, Hafiz Mahmood Ilahi
, Muhammad Umar Farooq
, Mudassar Rauf
, Muhammad Asim
, Sarmad Ali Khan

Division of Science, Engineering and Health Studies (SEHS)

Research output: Chapter in Book/Report/Conference proceeding › Chapter › peer-review

Abstract

Diamond-like carbon (DLC) coatings possess excellent mechanical properties, exceptional tribological performance, biocompatibility, better surface properties, chemical inertness, and structural and thermal stability. Therefore, these are widely employed in micro-electromechanical systems (MEMS). This chapter highlights the DLC applications in MEMS for different purposes, e.g. sensors, actuators, industrial processing, structural stability, and tribology.

Original language	English
Title of host publication	Applications of Diamond-like Carbon Coatings
Publisher	wiley
Pages	345-372
Number of pages	28
ISBN (Electronic)	9781394189144
ISBN (Print)	9781394189113
DOIs	https://doi.org/10.1002/9781394189144.ch12
Publication status	Published - 17 Mar 2025

Keywords

Actuators
Diamond-like carbon
Lubricants
MEMS
Nanotribology
Sensors

Access to Document

10.1002/9781394189144.ch12

Cite this

@inbook{71f5c34d83414b86976c19dba193b0af,

title = "Diamond-like carbon coating applications in MEMS",

abstract = "Diamond-like carbon (DLC) coatings possess excellent mechanical properties, exceptional tribological performance, biocompatibility, better surface properties, chemical inertness, and structural and thermal stability. Therefore, these are widely employed in micro-electromechanical systems (MEMS). This chapter highlights the DLC applications in MEMS for different purposes, e.g. sensors, actuators, industrial processing, structural stability, and tribology.",

keywords = "Actuators, Diamond-like carbon, Lubricants, MEMS, Nanotribology, Sensors",

author = "Muhammad Usman and Ilahi, \{Hafiz Mahmood\} and Farooq, \{Muhammad Umar\} and Mudassar Rauf and Muhammad Asim and Khan, \{Sarmad Ali\}",

year = "2025",

month = mar,

day = "17",

doi = "10.1002/9781394189144.ch12",

language = "English",

isbn = "9781394189113",

pages = "345--372",

booktitle = "Applications of Diamond-like Carbon Coatings",

publisher = "wiley",

}

TY - CHAP

T1 - Diamond-like carbon coating applications in MEMS

AU - Usman, Muhammad

AU - Ilahi, Hafiz Mahmood

AU - Farooq, Muhammad Umar

AU - Rauf, Mudassar

AU - Asim, Muhammad

AU - Khan, Sarmad Ali

PY - 2025/3/17

Y1 - 2025/3/17

N2 - Diamond-like carbon (DLC) coatings possess excellent mechanical properties, exceptional tribological performance, biocompatibility, better surface properties, chemical inertness, and structural and thermal stability. Therefore, these are widely employed in micro-electromechanical systems (MEMS). This chapter highlights the DLC applications in MEMS for different purposes, e.g. sensors, actuators, industrial processing, structural stability, and tribology.

AB - Diamond-like carbon (DLC) coatings possess excellent mechanical properties, exceptional tribological performance, biocompatibility, better surface properties, chemical inertness, and structural and thermal stability. Therefore, these are widely employed in micro-electromechanical systems (MEMS). This chapter highlights the DLC applications in MEMS for different purposes, e.g. sensors, actuators, industrial processing, structural stability, and tribology.

KW - Actuators

KW - Diamond-like carbon

KW - Lubricants

KW - MEMS

KW - Nanotribology

KW - Sensors

UR - https://www.scopus.com/pages/publications/105000573428

UR - https://www.mendeley.com/catalogue/ff8a27c2-32a0-3b1a-a1b6-bbb8bd7a0cf1/

U2 - 10.1002/9781394189144.ch12

DO - 10.1002/9781394189144.ch12

M3 - Chapter

AN - SCOPUS:105000573428

SN - 9781394189113

SP - 345

EP - 372

BT - Applications of Diamond-like Carbon Coatings

PB - wiley

ER -

Diamond-like carbon coating applications in MEMS

Abstract

Keywords

Access to Document

Other files and links

Fingerprint

Cite this