Effect of aluminum contents on sputter deposited CrAlN thin films

A. Vyas, Z. F. Zhou, Y. G. Shen

Research output: Contribution to journal › Conference article › peer-review

16 Citations (Scopus)

Fingerprint

Dive into the research topics of 'Effect of aluminum contents on sputter deposited CrAlN thin films'. Together they form a unique fingerprint.

Engineering

Keyphrases

Material Science