Influence of deposition conditions on mechanical and tribological properties of nanostructured TiN/CN_x multilayer films

Keyphrases

• Mechanical Properties 100%
• Tribological Properties 100%
• Nanostructures 100%
• Deposition Conditions 100%
• Multilayer Film 100%
• Bilayer Thickness 57%
• Layer Thickness 42%
• TiN Layer 28%
• Rockwell-C Adhesion Test 28%
• Nanoindentation Measurement 14%
• X Ray Diffraction 14%
• Chemical State 14%
• Rutile 14%
• X-ray Photoelectron Spectroscopy 14%
• Scanning Electron Microscopy 14%
• Wear Mechanism 14%
• Atomic Force Microscopy 14%
• Si(111) 14%
• Target Current 14%
• Microstructure 14%
• Wafer 14%
• Pin-on-disc Tribometer 14%
• Cohesive Strength 14%
• N2 Gas 14%
• Load Value 14%
• Compressive Stress 14%
• Carbon Nitride 14%
• Friction Coefficient 14%
• M42 High Speed Steel 14%
• Deposition Process 14%
• Maximum Hardness 14%
• Coefficient Value 14%
• High-speed Steel Substrate 14%
• X-ray Photoelectron Spectroscopy Analysis 14%
• Tribochemical Wear 14%
• Adhesive Wear 14%
• Optical Emission 14%
• TiNx 14%
• Closed-loop 14%
• Adhesive Properties 14%
• Wear Performance 14%
• Nanoindentation 14%
• Maximum Load 14%
• Adhesion Strength 14%
• Unbalanced Magnetron Sputtering 14%
• Microstructure Mechanical Properties 14%
• Scratch Test 14%
• Elastic Recovery 14%
• Nitrogen Incorporation 14%

Material Science

• Multilayer Film 100%
• Film 42%
• Nanoindentation 28%
• X-Ray Photoelectron Spectroscopy 28%
• X-Ray Diffraction 14%
• Chemical State 14%
• Magnetron Sputtering 14%
• Scanning Electron Microscopy 14%
• Mechanical Strength 14%
• Carbon Nitride 14%
• High Speed Steel 14%
• Titanium Dioxide 14%
• Elasticity 14%
• Adhesive Property 14%
• Adhesive Wear 14%