Structural and mechanical properties of Si-doped CrN coatings deposited by magnetron sputtering technique

Keyphrases

• Mechanical Properties 100%
• Structural Properties 100%
• Magnetron Sputtering Deposition 100%
• Si-doped 100%
• CrN Coating 100%
• AlCrN 66%
• Elastic Modulus 66%
• Surface Roughness 33%
• X Ray Diffraction 33%
• Si (100) Substrate 33%
• X-ray Photoelectron Spectroscopy 33%
• Atomic Force Microscopy 33%
• Target Current 33%
• Crystallite Size 33%
• Microstructural Properties 33%
• Solid Solution Hardening 33%
• Coated Surface 33%
• Nanoindentation Test 33%
• Si Addition 33%
• Si Concentration 33%
• CrSiN Coating 33%
• Direct Current Magnetron Sputtering 33%
• Si Content 33%
• Coating Roughness 33%

Material Science

• Magnetron Sputtering 100%
• Elastic Moduli 100%
• X-Ray Diffraction 50%
• Nanoindentation 50%
• X-Ray Photoelectron Spectroscopy 50%
• Surface Roughness 50%
• Solid Solution Hardening 50%
• Crystallite Size 50%