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Tribological Properties
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Nanostructures
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Optical Emission
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Bilayer Thickness
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Structural Mechanical Properties
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Mechanical Properties
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Chemical State
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Rutile
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Si(111)
50%
Target Current
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Cohesive Strength
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N2 Gas
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Load Value
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Frictional Coefficient
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Nanohardness
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Wear Rate
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Carbon Nitride
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Friction Coefficient
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M42 High Speed Steel
50%
Deposition Process
50%
High-speed Steel Substrate
50%
TiN Layer
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TiNx
50%
Closed-loop
50%
Adhesion Strength
50%
Unbalanced Magnetron Sputtering
50%
Scratch Test
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Layer Thickness
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Rockwell-C Adhesion Test
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Multilayer Film
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XPS Analysis
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Residual Compressive Stress
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Frictional Wear
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Engineering
Magnetron
100%
Critical Load
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Layer Thickness
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Multilayer Film
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Deposition Process
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Cohesive Strength
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Rockwell C
100%
Compressive Residual Stress
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Closed Loop
100%
High-Speed Steel
100%
Nanohardness
100%
Nitride
100%
Coefficient of Friction
100%
Material Science
Chemical State
100%
Film
100%
Magnetron Sputtering
100%
Mechanical Strength
100%
Carbon Nitride
100%
Coefficient of Friction
100%
High Speed Steel
100%
Nanohardness
100%
Titanium Dioxide
100%
Multilayer Film
100%